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Compact Type High Purity Air Operated Chemical Liquid Valve LVD

	・Space saving, compact model is available. 　Dimension across inlet/outlet ports: Reduced by up to 29% ・Body material: New PFA ・Diaphragm material: PTFE ・Actuator materials: PPS, PVDF (LVD-F/FN) Note) Tubing O.D. for the tube extension type

Data Download CAD PDF

Other Data	Safety Instructions　 Series Variations　 Work Procedure Instructions/LQ1, 2　 Fitting Procedure/LQ3　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)	Model
LVD	Integral fitting	N.C./N.O./ Double acting	3 to 19	1/8 to 3/4	2 to 16
LVD	Tube extension	N.C./N.O./ Double acting	6 to 19	1/4 to 3/4	4 to 16
LVD-F/FN	LQ1 integral fitting	N.C./N.O./ Double acting	3 to 25	1/8 to 1	4 to 22
LVD-F/FN	LQ2 integral fitting	N.C./N.O./ Double acting	6 to 25	1/4 to 1	4 to 22
LVD-F/FN	Tube extension	N.C./N.O./ Double acting	6 to 25	1/4 to 1	4 to 22

Compact Type High Purity Air Operated Chemical Liquid ValveLVD

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
LVD	Integral fitting
LVD	Tube extension
LVD-F/FN	LQ1 integral fitting
LVD-F/FN	LQ2 integral fitting
LVD-F/FN	Tube extension

■Space saving, compact model available

Compact type model is introduced as a new series to complement conventional LVC series with integral fittings.
Select a series according to the flow rate and installation requirements.
Mounting base dimensions conform to SEMI Standard, F65-1101.
(Except for the LVD10 and LVD60)