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Process Valves
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Compact 2/3 Port Solenoid Valves
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Subject ⁄ Industry Classified Products
Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW
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・For air, medium vacuum, water
・Body material: Aluminum, resin (PPS), Brass, Stainless steel ・With One-touch fittings (resin body) ・IP65 |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
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| VDW10/20 | N.C. | φ3.2, φ4, φ6, M5, 1/8 | φ1 to φ3.2 |
Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve)VDW
| Series | Download |
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| VDW10/20 |
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Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW
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∗ The production of the VDW10/20 series was discontinued
in December 2012. Please select the new VDW10/20 series. ∗ Excludes the VDW10/20 series manifold ∗ The production of the VDW30 series was discontinued in July 2015. Please select the VX21 series. ∗ The production of the 3-port solenoid valve VDW200/300 series is continued. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
|---|---|---|---|
| VDW200/300 | C.O. | M5 to 1/4 (8A) | 1 to 4 |
Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and AirVDW
| Series | Download |
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| VDW200/300 |
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Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
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・Compact/Lightweight resin body (PPS)
・IP65 ・Power consumption 3 W (Standard), 0.5 W (With power-saving circuit) |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
|---|---|---|---|
| VDW30/40-XF | N.C. | P7, P8 (Quick fastener) ø4, ø6, ø8, ø10 |
1 to 6 |
Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and AirVDW-XF
| Series | Download |
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| VDW30/40-XF |
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High Speed 2 Port Valve (2 Way Valve) SX10
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・High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
・Long service life: 5 billion cycles or more ・High frequency: 1200 Hz ・Width: 9 mm ・Low power consumption: 4 W |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
|---|---|---|---|
| SX10 | 50 | 80 40 10 4 |
1200 1000 550 350 |
| SX10 | 100 | 80 40 10 4 |
650 550 300 200 |
| SX10 | 150 | 80 40 10 4 |
600 500 250 150 |
High Speed 2 Port Valve (2 Way Valve)SX10
| Series | Download |
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| SX10 |
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| SX10 |
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| SX10 |
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Low Profile 2/3-Port Solenoid Valve SX90/090
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・Compact
Overall length: apporox 38 mm (2-port), 54 mm (3-port) Valve width/ height: 10 mm Weight: 10 g (2-port), 20 g (3-port) ・Large flow rate C [dm3 (/ s·bar)]: 0.25 (2-port/N.C.) , 0.5 (3-port) Flow rate [L/min (ANR)]: 45* (2-port), 90* (3-port) *At 0.2 MPa |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| SX91 | 2-port direct operated poppet valve |
0.25 | 45 | Normally closed |
| SX92 | 2-port direct operated poppet valve |
0.12 | 22 | Universal |
| SX090 | 3-port direct operated poppet valve |
0.5 | 90 | Universal |
Low Profile 2/3-Port Solenoid ValveSX90/090
| Series | Download |
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| SX91 |
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| SX92 |
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| SX090 |
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Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air
VQ
VQ
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・High-frequency operation is possible: High-speed response 7 ms or less (VQ20),
20 ms or less (VQ30) ・Easy piping with One-touch fittings ・The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type. ・Applications: Air-blow, Blow-off of workpieces, etc. ・Manifold type no.: VV2Q22, VV2Q32 |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
|---|---|---|---|
| VQ20 | N.C. | φ6 to φ12 | 3.4 |
| VQ30 | N.C. | φ6 to φ12 | 4.8 |
Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air<br>VQ
| Series | Download |
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| VQ20 |
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| VQ30 |
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Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM
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・Low Particle, Generation, Oil-free Metal-free ∗ Fluid contact parts
・Isolated structure The solenoid drive body is separated from the fluid area by a diaphragm. ・Power consumption (With power saving circuit): 1.0W or less ・Change in volume (Pumping volume): 0.01 μL or less |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| LVM07 Base mounted |
Direct operated rocker type | N.C. | -75kPa to 0.1MPa | 0.8 |
| LVM09 Body ported Base mounted |
Direct operated rocker type | N.C. N.O. Universal |
-75kPa to 0.2MPa | 1(Body ported) 1.1(Base mounted) |
| LVM10 Body ported Base mounted |
Direct operated rocker type | N.C. N.O. Universal |
-75kPa to 0.25MPa | 1.4 |
| LVM15 Body ported Base mounted |
Direct operated rocker type | N.C. N.O. Universal |
-75kPa to 0.25MPa (Max. 0.6 MPa) |
1.6 1(High-pressure type) |
| LVM20 Body ported Base mounted |
Direct operated rocker type | N.C. N.O. Universal |
-75kPa to 0.3MPa (Body ported: Max. 0.25 MPa) |
2 |
| LVM1□ Body ported Base mounted |
Direct Operated Poppet Type | N.C. | 0 to 0.25MPa | 1.5 |
Compact Direct Operated 2/3-Port Solenoid Valve for Chemical LiquidsLVM
| Series | Download |
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| LVM07 Base mounted |
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| LVM09 Body ported Base mounted |
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| LVM10 Body ported Base mounted |
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| LVM15 Body ported Base mounted |
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| LVM20 Body ported Base mounted |
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| LVM1□ Body ported Base mounted |
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Direct Operated 2/3 Port Isolated Valve LVMK20/200
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・Low particle generation, Oil-free, Metal-free
・Fluids: Air, Water, Deionized water, Diluent, Cleaning fluid ・Isolated structure: The solenoid drive body is separated from the fluid area by a block seal. ・Easy piping ・Minimal dead space ・Flow adjustment is not required. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
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| LVMK | N.C. Universal |
Bottom ported Side ported |
Body: PPS Seal: EPDM, FKM |
Direct Operated 2/3 Port Isolated ValveLVMK20/200
| Series | Download |
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| LVMK |
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Pinch Valve LPV22-X1
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・The fluid does not come into contact with the moving parts of the valve,
so there is no inflow of contaminants. By discarding a tube after use, the need for a washing process is eliminated, thus ensuring good hygiene. ・Compact Valve width: 20 mm ・Power consumption : 1.5 W (Built-in power saving circuit) ・Improved tubing life Less damage to the tube due to an arc shape of the tube clamp ・Easy tubing replacement |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
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| LPV | Direct operated solenoid | N.O. | Silicone O.D.: ø4, I.D.: ø2 O.D.: ø5/32", I.D.: ø1/32" |
Pinch ValveLPV22-X1
| Series | Download |
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| LPV |
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Diaphragm Valve for Ultra High Purity AZ
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・Cleaned for high-purity semiconductor applications and clean room assembled
・Helium leak tested ・SEMI Standards-compliant ・User-friendly forged body |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
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| AZ | Air operated | 316L SS | Face seal Tube weld |
1/4'' 3/8'' 1/2 |
| AZ | Manual | 316L SS | Face seal Tube weld |
1/4'' 3/8'' 1/2 |
Diaphragm Valve for Ultra High PurityAZ
| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Download |
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| AZ | Air operated |
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| AZ | Manual |
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Normal Close High Vacuum Solenoid Valve XSA
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・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s ・2 types of fittings are available. ・Power consumption: Max. 25% reduction ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg) |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
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| XSA | Normal Close | Air Inert gas |
Face seal fitting Compression fitting |
1/4, 3/8 |
| XSA | Normal Close | Air Inert gas |
Female thread (Rc, NPT) |
1/8, 1/4, 3/8 |
Normal Close High Vacuum Solenoid ValveXSA
| Series | Download |
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| XSA |
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| XSA |
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