Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

	・For UHP gas delivery in semiconductor and other clean industries ・Body material: 316L SS secondary remelt or 316L SS ・Electropolished wetted parts ・External metal seal construction

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Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)	Model
AP/SL	Single stage	Distribution (Compact)	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8''
AP/SL	Single stage	Distribution	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP/SL	Single stage	Bulk gas	316L SS	Face seal Tube weld	1/2'', 3/4'', 1''
AP/SL	Single stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP/SL	Single stage	Sub-atmospheric pressure	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''
AP	Two stage	Source	316L SS secondary remelt	Face seal Tube weld	1/4''，3/8''
AZ	Single stage	Distribution	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''
AZ	Single stage	Source	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''
AZ	Single stage	Sub-atmospheric pressure	316L SS	Face seal Tube weld	1/4'', 3/8'' 1/2''

Regulators for Ultra High Purity (UHP)AP/SL/AP/AZ

Series	Download
AP/SL
AP/SL
AP/SL
AP/SL
AP/SL
AP
AZ
AZ
AZ

Regulator/Back Pressure Regulator for General Applications AK/BP

	・For a wide variety of applications from semiconductor to general ・Body material of 316 SS or brass is available depending on the gas.

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Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)	Model
AK	Single stage	Distribution	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Single stage	Source	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Single stage	Sub-atmospheric pressure	316 SS or Brass	NPT female, Compression	1/4'', 3/8'' 1/2''
AK	Two stage	Source	316 SS or Brass	NPT female, Compression	1/4''
BP	Back pressure regulator	―	316 SS or Brass	NPT female, Compression	1/4''

Regulator/Back Pressure Regulator for General ApplicationsAK/BP

Series	Download
AK
AK
AK
AK
BP

Diaphragm Valve for Ultra High Purity AP

	・For UHP gas delivery in semiconductor and other clean industries ・Used as a gas shutoff valve ・No spring is used for the wetted parts and the drive part is also separated 　from the diaphragm. Dead space in the flow path is small in order to suppress 　particle generation.

Data Download PDF

Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)
AP	Air operated	316L SS secondary remelt	Face seal Tube weld	1/4''，3/8'' 1/2''，3/4''
AP	Manual	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8'' 1/2'', 3/4''

Diaphragm Valve for Ultra High PurityAP

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
AP	Air operated
AP	Manual

Diaphragm Valve for Ultra High Purity AZ

	・Cleaned for high-purity semiconductor applications and clean room assembled ・Helium leak tested ・SEMI Standards-compliant ・User-friendly forged body

Data Download CAD PDF

Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)
AZ	Air operated	316L SS	Face seal Tube weld	1/4'' 3/8'' 1/2
AZ	Manual	316L SS	Face seal Tube weld	1/4'' 3/8'' 1/2

Diaphragm Valve for Ultra High PurityAZ

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
AZ	Air operated
AZ	Manual

Check Valve/Vacuum Generator/Flow Switch AP

[Check valve]
・Fluid backflow is prevented by back pressure.
・Unique design with only one moving part in the gas stream, an O-ring
・Springless structure suppresses particle generation by vibration or
　chattering and pressure fluctuations on the downstream side

[Vacuum generator]
・Vacuum generation equipment
・Applicable to the exhaustion of unnecessary gas remaining inside the
　piping during gas cylinder replacement

[Flow switch]
・Detects excess flow above a given flow rate caused by pipe breakage, etc.

Data Download PDF

Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)
AP	Check valve	316L SS secondary remelt	Face seal Tube weld	1/4'', 3/8''
AP	Vacuum generator	316L SS	Face seal Tube weld	1/4'', 3/8''
AP	Flow switch	316L SS secondary remelt 316L SS	Face seal Tube weld	1/2'', 3/4''

Check Valve/Vacuum Generator/Flow SwitchAP

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
AP	Check valve
AP	Vacuum generator
AP	Flow switch

Diaphragm Valve for General Applications AK

・Rc, R, and NPT connections have been added to the series.
・For a wide variety of applications from semiconductor to general
・Cleaned for O₂ service
・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
・M5 actuation port (AK3542/4542)
・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
・The knob features a unique design that combines a scalloped round knob with a raised
　rectangular section to provide two choices of gripping. (AK3652/4652)

Data Download CAD PDF

Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)
AK	Air operated	316 SS	Compression Rc, R, NPT	1/4''，3/8''
AK	Manual	316 SS	Compression Rc, R, NPT	1/4''，3/8''

Diaphragm Valve for General ApplicationsAK

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
AK	Air operated
AK	Manual

Regulator for General Applications AK1000T

	・For a wide variety of applications from semiconductor to general ・Compact and lightweight 　Weight: 0.52 kg, Height: 97.5 mm ・Minimum dead leg construction ・Multiple port types are available. 　Select from compression, NPT female, or Rc thread.

Data Download PDF

Other Data	Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Flow characteristics 4/2→3/5（A/B→E） b	Applicable cylinder size	Power consumption (W)
AK1000T	Manually operated type	316 SS	Compression Rc, NPT	1/4", 3/8"

Regulator for General ApplicationsAK1000T

Series	Flow characteristics 4/2→3/5（A/B→E） C［dm³/（s・bar）］	Download
AK1000T	Manually operated type

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