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IN_PROD_533
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Process Gas Equipment
IN_PROD_534
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Process Gas Equipment
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Subject ⁄ Industry Classified Products
Regulator/Back Pressure Regulator for General Applications AK/BP
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・For a wide variety of applications from semiconductor to general
・Body material of 316 SS or brass is available depending on the gas. |
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| Other Data |
|---|
| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| AK | Single stage | Distribution | 316 SS or Brass |
NPT female, Compression | 1/4'', 3/8'' 1/2'' |
| AK | Single stage | Source | 316 SS or Brass |
NPT female, Compression | 1/4'', 3/8'' 1/2'' |
| AK | Single stage | Sub-atmospheric pressure | 316 SS or Brass |
NPT female, Compression | 1/4'', 3/8'' 1/2'' |
| AK | Two stage | Source | 316 SS or Brass |
NPT female, Compression | 1/4'' |
| BP | Back pressure regulator | ― | 316 SS or Brass |
NPT female, Compression | 1/4'' |
Regulator/Back Pressure Regulator for General ApplicationsAK/BP
| Series | Download |
|---|---|
| AK |
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| AK |
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| AK |
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| AK |
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| BP |
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■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
