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IN_PROD_549
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High Vacuum Equipment
IN_PROD_550
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High Vacuum Valves
Product List
Subject ⁄ Industry Classified Products
Aluminum High Vacuum Angle Valve XLA/C/F/G
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・Aluminum bodied
Uniform baking temperature Lightweight, Compact Minimal outgassing Minimal contamination from heavy metals ・Bellows are replaceable. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XLA-2 | Air operated |
Single acting (N.C.) |
Bellows seal | Dust free, cleaned |
16 to 80 |
| XLAV-2 (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows seal | Dust free, cleaned |
16 to 80 |
| XLC-2 | Air operated |
Double acting |
Bellows seal | Dust free, cleaned |
16 to 80 |
| XLF-2 | Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
| XLFV-2 (With solenoid valve) |
Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
| XLG -2 | Air operated |
Double acting |
O-ring seal | High-speed operation, High operating cycles |
16 to 80 |
Aluminum High Vacuum Angle ValveXLA/C/F/G
| Series | Download |
|---|---|
| XLA-2 |
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| XLAV-2 (With solenoid valve) |
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| XLC-2 |
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| XLF-2 |
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| XLFV-2 (With solenoid valve) |
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| XLG -2 |
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Aluminum High Vacuum Angle Valve XLA/C-100・160（-1）-X152
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・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles ・Space required for equipment can be reduced Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa) Increased flexibility of mounting orientation ・Lightweight, Compact |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XLA-100・160-X152 | Air operated |
Single acting (N.C.) |
Bellows seal | Dust free, cleaned |
100，160 |
| XLC-100・160-1-X152 | Air operated |
Double acting |
Bellows seal | Dust free, cleaned |
100，160 |
Aluminum High Vacuum Angle ValveXLA/C-100・160（-1）-X152
| Series | Download |
|---|---|
| XLA-100・160-X152 |
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| XLC-100・160-1-X152 |
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Aluminum High Vacuum Angle Valve XL□
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・High fluorine resistance
・Minimal outgassing ・Minimal contamination from heavy metals ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been remodeled in September 2017. Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XLA | Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLAV (With solenoid valve) |
Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLC | Air operated |
Bellows seal | Double acting |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLCV (With solenoid valve) |
Air operated |
Bellows seal | Double acting |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 80 |
| XLF | Air operated |
O-ring seal | Single acting (N.C.) |
Body : Aluminum alloy | 16 to 160 |
| XLFV (With solenoid valve) |
Air operated |
O-ring seal | Single acting (N.C.) |
Body : Aluminum alloy | 16 to 160 |
| XLG | Air operated |
O-ring seal | Double acting |
Body : Aluminum alloy | 16 to 80 |
| XLGV (With solenoid valve) |
Air operated |
O-ring seal | Double acting |
Body : Aluminum alloy | 16 to 80 |
| XLD | Air operated |
Bellows/O-ring seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
25 to 160 |
| XLDV (With solenoid valve) |
Air operated |
Bellows/O-ring seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
25 to 160 |
| XLH | Manual | Bellows seal | Manual | Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 50 |
| XLS | Electromagnetic | Pressure balanced bellow seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16, 25 |
Aluminum High Vacuum Angle ValveXL□
| Series | Download |
|---|---|
| XLA |
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| XLAV (With solenoid valve) |
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| XLC |
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| XLCV (With solenoid valve) |
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| XLF |
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| XLFV (With solenoid valve) |
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| XLG |
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| XLGV (With solenoid valve) |
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| XLD |
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| XLDV (With solenoid valve) |
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| XLH |
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| XLS |
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Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
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・One-touch connection and release (No tools are required.)
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XLAQ | Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
16 to 50 |
| XLDQ | Air operated |
Bellows seal O-ring seal |
Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
40, 50 |
Aluminum One-touch Connection and Release High Vacuum Angle ValveXLAQ/XLDQ
| Series | Download |
|---|---|
| XLAQ |
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| XLDQ |
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Stainless Steel High Vacuum Angle/In-line Valve XM/XY
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・The precision casting, unified composition prevents the accumulation of gas.
・The XM series is interchangeable with the XL series aluminum high vacuum angle valve. Note) Size 16 is not available for the in-line type. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XMA/XYA | Air operated | Bellows seal | Single acting (N.C.) |
Body : SCS13 (equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 80 Note) |
| XMC/XYC | Air operated | Bellows seal | Double acting | Body : SCS13 (equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 80 Note) |
| XMD/XYD | Air operated | Bellows/O-ring seal |
Single acting (N.C.) |
Body : SCS13 (equivalent to stainless steel 304) Bellows : Stainless steel 316L |
25 to 80 |
| XMH/XYH | Manual | Bellows seal | Manual | Body : SCS13 (equivalent to stainless steel 304) Bellows : Stainless steel 316L |
16 to 50 Note) |
Stainless Steel High Vacuum Angle/In-line ValveXM/XY
| Series | Download |
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| XMA/XYA |
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| XMC/XYC |
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| XMD/XYD |
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| XMH/XYH |
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Normal Close High Vacuum Solenoid Valve XSA
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・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s ・2 types of fittings are available. ・Power consumption: Max. 25% reduction ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg) |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| XSA | Normal Close | Air Inert gas |
Face seal fitting Compression fitting |
1/4, 3/8 |
| XSA | Normal Close | Air Inert gas |
Female thread (Rc, NPT) |
1/8, 1/4, 3/8 |
Normal Close High Vacuum Solenoid ValveXSA
| Series | Download |
|---|---|
| XSA |
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| XSA |
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Smooth Vent Valve XVD
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・The valve/needle valve-integrated construction requires only 1/4 the piping
space of previous models. ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion. ・Flow of both the initial air supply and the main air supply can be adjusted. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| XVD | Normally closed (Open when pressured, Spring seal) |
Nitrogen, Air, Inert gas, etc. |
VCR® Swagelok® |
1/4B |
Smooth Vent ValveXVD
| Series | Download |
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| XVD |
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