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WEB Catalog
Product List
Subject ⁄ Industry Classified Products
For 300 mm wafer Parallel Seal Type Slit Valve XGTP
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more (compared with the current product) ・Easier maintenance Easy replacement of bellows Gate can be replaced from above.(Made to order) ・Safety measures A mechanical end lock mechanism has been adopted. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 |
Inert gas | 50 x 336 | 0.45 to 0.6 |
For 300 mm wafer Parallel Seal Type Slit ValveXGTP
| Series | Download |
|---|---|
| XGTP |
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Slit Valve XGT
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・This product is suitable to act as the partition valve between
the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment. |
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| Other Data |
|---|
| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 |
Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
Slit ValveXGT
| Series | Download |
|---|---|
| XGT |
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