WEB Catalog
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・High fluorine resistance
・Minimal outgassing ・Minimal contamination from heavy metals ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been remodeled in September 2017. Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
|---|---|---|---|---|---|
| XLA | Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLAV (With solenoid valve) |
Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLC | Air operated |
Bellows seal | Double acting |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 160 |
| XLCV (With solenoid valve) |
Air operated |
Bellows seal | Double acting |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 80 |
| XLF | Air operated |
O-ring seal | Single acting (N.C.) |
Body : Aluminum alloy | 16 to 160 |
| XLFV (With solenoid valve) |
Air operated |
O-ring seal | Single acting (N.C.) |
Body : Aluminum alloy | 16 to 160 |
| XLG | Air operated |
O-ring seal | Double acting |
Body : Aluminum alloy | 16 to 80 |
| XLGV (With solenoid valve) |
Air operated |
O-ring seal | Double acting |
Body : Aluminum alloy | 16 to 80 |
| XLD | Air operated |
Bellows/O-ring seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
25 to 160 |
| XLDV (With solenoid valve) |
Air operated |
Bellows/O-ring seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
25 to 160 |
| XLH | Manual | Bellows seal | Manual | Body : Aluminum alloy Bellows : Stainless steel 316L |
16 to 50 |
| XLS | Electromagnetic | Pressure balanced bellow seal |
Single acting (N.C.) |
Body : Aluminum alloy Bellows : Stainless steel 316L |
16, 25 |
| Series | Download |
|---|---|
| XLA |
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| XLAV (With solenoid valve) |
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| XLC |
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| XLCV (With solenoid valve) |
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| XLF |
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| XLFV (With solenoid valve) |
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| XLG |
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| XLGV (With solenoid valve) |
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| XLD |
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| XLDV (With solenoid valve) |
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| XLH |
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| XLS |
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Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator
For 100/120° C
