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Subject ⁄ Industry Classified Products
For 300 mm wafer Parallel Seal Type Slit Valve XGTP
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more (compared with the current product) ・Easier maintenance Easy replacement of bellows Gate can be replaced from above.(Made to order) ・Safety measures A mechanical end lock mechanism has been adopted. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 |
Inert gas | 50 x 336 | 0.45 to 0.6 |
For 300 mm wafer Parallel Seal Type Slit ValveXGTP
| Series | Download |
|---|---|
| XGTP |
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■Long service life 3 million cycles (at ordinary temperature)
Low particle generation Reduced by 1/5 or more
Low particle generation Reduced by 1/5 or more
■Low particle generation and longer service life through the use of
a parallel sealing motion
a parallel sealing motion
The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.
■Easier maintenance
Easy replacement of bellows
Gate can be replaced from above.(Made to order)
■Related Products
