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Temperature Control Equipment
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
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Water-cooled Thermo-chiller/High-performance Type HRW
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required. ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc. ・Compliant with UL Standards, SEMI Standards, CE-marking ・It is possible to select the inverter type. |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
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| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) |
Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Water-cooled Thermo-chiller/High-performance TypeHRW
| Series | Download |
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| HRW |
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