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Temperature Control Equipment
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
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Thermo-chiller/High-performance Type HRZ
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・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc. ・Compliant with various safety standards ・Compliant with UL Standards, SEMI Standards, CE-marking |
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| Other Data |
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| Series | Flow characteristics 4/2→3/5（A/B→E） C［dm3/（s・bar）］ |
Flow characteristics 4/2→3/5（A/B→E） b |
Applicable cylinder size |
Power consumption (W) |
Model |
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| HRZ | -20 to 40 20 to 90 -20 to 90 |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Thermo-chiller/High-performance TypeHRZ
| Series | Download |
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| HRZ |
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